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Thermal Evaporator System

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Thermal Evaporator System이미지
Application Au, Al, Ag, Cu, Ti, LiF & Etc metal process
PbI2, PbCl2, MAI & Etc Organic , Inorganic process
Solar cell Hybrid solution process
Specification
Substrate Size Piece ~ Optional (Circular or Rectangular type)
E-Gun Pocket 4cc ~ 40cc, Single ~ 6 pocket (Optional large size)
E-Gun Power 3kW ~ 15kW (D.C 10kV)
Ultimate Pressure Below than 2 x 10-7Torr
Film Uniformity < ±5% WIW, WTW, RTR
Heating temperature Max heat-up 350℃ (Temp Uniformity : <±5%)
Loadlock Chamber Unit Optional
Thickness monitor Rate monitoring or Rate control type
System Operating Type Semi-Auto or Fully auto Control
(Using PLC Base Touch screen or P.C Monitor)