VACUUM SYSTEM

• Thermal Evaporator System
• E-Beam Evaporator System
• Magnetron Sputtering System
• Rapid Thermal Process System
• 초고속 진공 증착기 (Super high speed Evaporator System)
• CNT Application System (Growth, Measurement, Crystalization, etc)
• X-Ray Application System (Source, Measurement, Packaging, etc)
• Dry Etcher System (I.C.P & RIE System)
• CVD System (PE, R.P, LP, R.T, Thermal CVD System)
• Vacuum Furnace System
• System Upgrade & Modify & Consulting

Vacuum Components

• Magnetron Sputter Cathode (Rectangular & Circular Type)
• Variable Substrate Heater (Up To 1000 ℃) (SiC, Halogen Lamp, Sheathe Wire, W Wire, Etc)
• Loading & Unloading Components
• Motion & Manipulator (Rotary Motion, Linear Motion, Z-Motion, X-Y Stage, Etc)
• Evaporation Source (Metal, Oxide, Organic, Etc Alloys) (Up & Down Evaporation Type)
• Etc Vacuum Compatible Components